CAPACITOR INSPECTION APPARATUS AND INSPECTION METHOD USING THE SAME

PROBLEM TO BE SOLVED: To provide a capacitor inspection apparatus capable of measuring the impedance of capacitor within a very short time and with high accuracy, and an inspecting method employing the device by resolving the problem, wherein it is difficult to obtain both high-speed measurements of the impedance of the solid electrolytic capacitor, and high-accuracy measurements of the same. SOLUTION: The capacitor inspection apparatus of four terminals structure, provided with anode terminals and cathode terminals on the lower surface thereof, is constituted of a substrate 3 with a microstrip line 4 and a ground 5 formed thereon, a measuring unit 1 provided on the substrate 3 and a network analyzer 12 constituted of four terminals circuit network. The microstrip line 4 and the ground 5 in the measuring unit 1 are constituted so that pin-type measuring terminals for inputting and outputting a signal by respectively abutting against four terminals of the capacitor 2 are planted, thereby the constitution is made simple and impedance, such as unnecessary resistance, will not be generated and measurement of ESL in a very short time, with high accuracy is permitted. COPYRIGHT: (C)2009,JPO&INPIT