FLEXURE TYPE ACCELEROMETER AND METHOD OF MAKING THE SAME

PROBLEM TO BE SOLVED: To provide a flexure type accelerometer having a proof mass offset from a magnetic circuit with offset pads or spacers integrally formed on a paddle surface of a reed. SOLUTION: A proof mass for flexure type, magnetic and capacitance circuit accelerometer includes one or more protruding pads integrally formed on a fused silica paddle, such as being etched or patterned on the fused silica paddle. Further, the protruding pads have a thickness sufficient to locate at least a portion of one active coil in proximity to or even within a linear magnetic flux region of the magnetic circuit of the accelerometer. As such, the proof mass is configured to function with the magnetic circuit in a consistent and stable manner over a selected operational life of the accelerometer. COPYRIGHT: (C)2009,JPO&INPIT