THREE DIMENSIONAL SHAPE MEASURING METHOD AND THREE DIMENSIONAL SHAPE MEASURING DEVICE

PROBLEM TO BE SOLVED: To provide a three dimensional shape measuring method in three dimensional shape measurement by a light cutting method for systematizing the processing to the shape distortion such as deflection existing in slit light radiated to a workpiece, reducing the measurement error resulting from the shape distortion of the slit light, and improving the stability and versatility of measurement. SOLUTION: In a state where certain slit light 11 is irradiated to a reference plane 31 by using a flat reference plate 30 having the reference plane 31, the slit cross section lines 22 formed in the reference plane 31 are imaged at various position attitudes of the flat reference plate 30; the slit cross section line 22 about each position attitude is obtained; a common curve to which the plurality of slit cross section lines 22 approximately adapt is derived; the slit surface shape of the slit light 11 is modeled as the curved surface; and the slit surface shape of the slit light 11 is used as the modeled curved surface in measuring the three-dimensional shape of the workpiece. COPYRIGHT: (C)2009,JPO&INPIT