SEMICONDUCTOR INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide a semiconductor inspection device having a probe structure capable of increasing the number of pins and narrowing a pitch in the X-X direction and in the Y-Y direction. SOLUTION: This semiconductor inspection device having a contactor connected electrically to an ele...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAGISHI KATSUNORI, SHIRAISHI AKINORI, HIGASHI MITSUTOSHI, AIZAWA MITSUHIRO, MURAYAMA HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a semiconductor inspection device having a probe structure capable of increasing the number of pins and narrowing a pitch in the X-X direction and in the Y-Y direction. SOLUTION: This semiconductor inspection device having a contactor connected electrically to an electrode pad formed on a semiconductor device which is a measuring object, and a substrate provided with the contactor, has a characteristic wherein the contactor is provided obliquely with respect to the main surface of the substrate. COPYRIGHT: (C)2009,JPO&INPIT