LIQUID RAW MATERIAL VAPORIZER AND FILM-FORMING DEVICE USING IT

PROBLEM TO BE SOLVED: To prevent clogging of an air permeable member with droplets left unvaporized by averaging the temperature of the entire air permeable member in vaporization of the droplets of liquid raw material through the air permeable member. SOLUTION: The liquid raw material vaporizer 300 has a liquid raw material supply part 300A dropping and discharging the liquid raw material to a vaporization space 350, a vaporization part 300B, an inlet 338 introducing the dropped liquid raw material from the liquid raw material supply part into the vaporization part, a mist trap part 360 constituted by the air permeable member 362 disposed in the vaporization part and made of a material heated with radiant heat, a radiation heater 370 radiating the entire outer surface of the air permeable member with heat rays to heat the air permeable member with the radiant heat, and an outlet 340 feeding a raw gas generated by vaporizing the dropped liquid raw material through the heated air permeable member to the outside. COPYRIGHT: (C)2009,JPO&INPIT