CHEMICAL TREATMENT METHOD FOR CHLOROSILANES

PROBLEM TO BE SOLVED: To solve problems that, in an assay of inorganic impurity elements in highly pure chlorosilanes, it is very difficult to perform a hydrolysis with efficiency and safety since a hydrolysis reaction of a sample is an intense reaction accompanied by production of hydrogen chloride and silicic acid and by generation of heat, and that the decomposition takes time since it is necessary to handle a large amount of samples to detect a minute amount of impurities in the case of a gas sample. SOLUTION: With the analyzing method, it is possible to perform a hydrolysis of chlorosilanes safely and mildly in a short time, by contacting a sample solidified by cooling with hydrofluoric acid previously solidified as well by cooling or with liquid hydrofluoric acid. Then, the present invention has a purpose to provide treatment of a sample to be analyzed capable of analyzing impurities with high sensitivity by removing by-products by heat vaporization as well as by condensing a minute amount of impurities. COPYRIGHT: (C)2009,JPO&INPIT