FLOWABLE CHIP, AND METHOD FOR USING THE SAME

PROBLEM TO BE SOLVED: To solve such a problem that conventional granular polycrystalline silicon has too low purity irrespective of a process used for recharging a granular material depending on applications. SOLUTION: Flowable chips are a polycrystalline silicon piece group which comprises polycrys...

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Hauptverfasser:	HORSTMAN TERENCE LEE, SCHMIDT CHRIS TIM, ARVIDSON ARVID NEIL, MOLNAR MICHAEL JOHN, SPENCER ROGER DALE JR
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY COMPOUNDS THEREOF CRYSTAL GROWTH INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To solve such a problem that conventional granular polycrystalline silicon has too low purity irrespective of a process used for recharging a granular material depending on applications. SOLUTION: Flowable chips are a polycrystalline silicon piece group which comprises polycrystalline silicon pieces prepared by a chemical vapor deposition process and having bulk impurities at a level not exceeding 0.03 ppma and surface impurities at a level not exceeding 15 ppba, and which moreover has a controlled particle size distribution and generally has nonspherical morphology. COPYRIGHT: (C)2009,JPO&INPIT