METHOD AND DEVICE FOR INSPECTING PATTERN

PROBLEM TO BE SOLVED: To improve inspection precision by enhancing utilization efficiency of illumination light and eliminating noises generated when injecting the direct light of a light source to a camera, and to improve inspection precision without being affected by the arrangement direction of the circuit pattern and by the size of a void, a dent, or a flaw with the assumption on the transmission system which can precisely detect shortage of the circuit pattern. SOLUTION: Light is injected to the inner side of a spherical body 164a where an injection port 164e opening toward an inspection object 10 and the inner surface is nearly spherical shape diffusion reflection surface. The incident light is reflected by the inner surface of the spherical body 164a to be turned into scattered light. The scattered light is injected from the injection port 164e to the inspection object 10, and the transmission image of the inspection object 10 with this scattered light is photographed. Using this photographed image, the pattern is inspected. COPYRIGHT: (C)2009,JPO&INPIT