FAN FILTER UNIT

FAN FILTER UNIT

PROBLEM TO BE SOLVED: To prevent air leakage by reducing the number of components, and to install an indicating lamp and a pressure detection tube on a downwind face in a fan filter unit mainly used in a clean room. SOLUTION: The fan filter unit 5 includes a fan unit 3 comprising a fan 1 and a motor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: IKEMURA YASUO
Format: Patent
Sprache:eng
Schlagworte:
AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
RANGES
SEPARATION
TRANSPORTING
VENTILATING
WEAPONS
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To prevent air leakage by reducing the number of components, and to install an indicating lamp and a pressure detection tube on a downwind face in a fan filter unit mainly used in a clean room. SOLUTION: The fan filter unit 5 includes a fan unit 3 comprising a fan 1 and a motor 2, and a filter 4 in its downstream side. In the fan filter, a frame of the fan unit 3 and a frame of the filter are shared and integrated through a shape frame 7. The number of components is reduced, and airtight performance is improved by planar accuracy and rigidity of the shape frame 7. COPYRIGHT: (C)2009,JPO&INPIT