TREATED LIQUID MIXING DEVICE, SUBSTRATE TREATMENT APPARATUS, TREATED LIQUID MIXING METHOD AND MEMORY MEDIUM

PROBLEM TO BE SOLVED: To keep the mixing ratio of a treated liquid, which is produced in a mixing tank, constant. SOLUTION: At first, discharge valves 23, 24 and 25 are opened while supply valves 26-31 are closed and raw material liquids A, B and C are discharged outside of the discharge valves 23,...

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Bibliographische Detailangaben
1. Verfasser:	SATAKE KEIGO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To keep the mixing ratio of a treated liquid, which is produced in a mixing tank, constant. SOLUTION: At first, discharge valves 23, 24 and 25 are opened while supply valves 26-31 are closed and raw material liquids A, B and C are discharged outside of the discharge valves 23, 24 and 25. After all of the flow of the raw material liquids A, B and C detected by LFCs 20, 21 and 22 reach a predetermined flow, the discharge valves 23, 24 and 25 are closed to open supply valves 17, 29 and 31 to supply the raw material liquids A, B and C to a second mixing tank 3 through the supply valves 17, 29 and 31. COPYRIGHT: (C)2009,JPO&INPIT