SUPPORTING SYSTEM FOR SEMICONDUCTOR MANUFACTURING

PROBLEM TO BE SOLVED: To provide a supporting system for the semiconductor manufacturing, which manufactures semiconductor devices with a high yield by reducing a variation in the electric properties and machining dimensions of semiconductor devices. SOLUTION: This supporting system for the semicond...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUJIWARA SHOICHIRO, YAMAMOTO KEIZO, SAKAI KATSUNAO, ARAI HIROMASA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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