SOLUTION DISCHARGER
PROBLEM TO BE SOLVED: To provide a solution discharger which is capable of surely removing a solution remaining in a nozzle plate and which is excellent in reliability that does not impart an adverse influence, for example, on the formation of a functional membrane. SOLUTION: In the solution dischar...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a solution discharger which is capable of surely removing a solution remaining in a nozzle plate and which is excellent in reliability that does not impart an adverse influence, for example, on the formation of a functional membrane. SOLUTION: In the solution discharger, a gutter 34 communicating with each screw hole 31 is formed in a nozzle plate 30 of a coating head 6. A suction pressure is added to the gutter 34. COPYRIGHT: (C)2009,JPO&INPIT |
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