METHOD OF MANUFACTURING LIQUID JETTING HEAD, AND LIQUID JETTING DEVICE

PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid jetting head, the yield of which is improved by easily removing foreign matters. SOLUTION: The manufacturing method for the liquid jetting head is equipped with a flow passage forming board 10 provided with pressure generating chambers 12 communicating with a nozzle opening provided thereon, pressure generating means 300, which are provided on one side of the flow passage forming board 10 and generate pressure change in the pressure generating chambers 12 and a protective board 30, which is joined to the side with the pressure generating means 300 thereon of the flow passage forming board 10 and on the surface of which wirings 220 are formed. The method includes a dry-cleaning process for executing dry-etching in plasma etching mode over the surface on the wiring 220 side of the protective board 30, and a cleaning process consisting of a liquid cleaning process for cleaning over the surface on the pressure generating chamber 12 side of the flow passage forming board 10 with cleaning solution. COPYRIGHT: (C)2009,JPO&INPIT