SCANNING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To solve a problem in work such as an EBAC analysis that a probe connected to an amplifier must be touched on an analysis object lead wire to detect a current absorbed by the analysis object lead wire, requiring a worker to share a considerable load to perform the work, for example, in a point that since the probe touching object pattern must be searched and also be located at the center of an SEM display image and thereafter the probe end point must be moved to the SEM display image center, this step requires the repetition of the work that the probe is moved within the SEM display image at a lower magnification of the SEM image and the probe is then moved on the probe touching pattern while SEM observation magnification is increased. SOLUTION: In the scanning electron microscope, when the analysis object location (probe touching location) in a sample is moved to the center of the sight of an image display area, the front end point of probe of prober can be automatically moved into the sight of the image display area. COPYRIGHT: (C)2009,JPO&INPIT