X-Y STAGE DEVICE
PROBLEM TO BE SOLVED: To provide an X-Y stage device transportable on a road without increasing a cost for disassembly and reassembly. SOLUTION: This X-Y stage device comprises a pair of X-axis linear motor installed on both sides of a fixed base, respectively, a Y-axis linear motor installed on a b...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an X-Y stage device transportable on a road without increasing a cost for disassembly and reassembly. SOLUTION: This X-Y stage device comprises a pair of X-axis linear motor installed on both sides of a fixed base, respectively, a Y-axis linear motor installed on a bridge member bridged between the sliders of the pair of X-axis linear motors, and a working head mounted on the slider of the Y-axis linear motor. The X-Y stage device further comprises a retreating means extending to at least one end of the Y-axis linear motor and capable of retreating the working head in the Y-axis direction. COPYRIGHT: (C)2009,JPO&INPIT |
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