X-Y STAGE DEVICE

PROBLEM TO BE SOLVED: To provide an X-Y stage device transportable on a road without increasing a cost for disassembly and reassembly. SOLUTION: This X-Y stage device comprises a pair of X-axis linear motor installed on both sides of a fixed base, respectively, a Y-axis linear motor installed on a b...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: FUJII HIROTSUYO
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide an X-Y stage device transportable on a road without increasing a cost for disassembly and reassembly. SOLUTION: This X-Y stage device comprises a pair of X-axis linear motor installed on both sides of a fixed base, respectively, a Y-axis linear motor installed on a bridge member bridged between the sliders of the pair of X-axis linear motors, and a working head mounted on the slider of the Y-axis linear motor. The X-Y stage device further comprises a retreating means extending to at least one end of the Y-axis linear motor and capable of retreating the working head in the Y-axis direction. COPYRIGHT: (C)2009,JPO&INPIT