CERAMIC FILM AND METHOD FOR MANUFACTURING THE SAME, SEMICONDUCTOR DEVICE, PIEZOELECTRIC ELEMENT, AND ACTUATOR

PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic film which can improve a surface morphology of the ceramic film, to provide a ceramic film manufactured by the method, and to provide a semiconductor device and a piezoelectric element using this ceramic film. SOLUTION: The method...

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Bibliographische Detailangaben
Hauptverfasser:	NATORI EIJI, FURUYAMA KOICHI, TAZAKI YUZO
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic film which can improve a surface morphology of the ceramic film, to provide a ceramic film manufactured by the method, and to provide a semiconductor device and a piezoelectric element using this ceramic film. SOLUTION: The method for manufacturing the ceramic film comprises a step of forming the ceramic film 30 by crystallizing a raw material body 20, wherein the raw material body 20 contains different types of raw materials in a mixed state, and the different types of raw materials differ from one another with respect to at least one of crystal growth condition and crystal growth mechanism in the crystallization of the raw materials. COPYRIGHT: (C)2009,JPO&INPIT