FEEDER FOR SOLID ORGANIC METAL COMPOUND

PROBLEM TO BE SOLVED: To stably feed an organic metal compound over many hours in a feeding device for feeding a solid organic metal compound together with a carrier gas at room temperature. SOLUTION: The feeder is provided with two column-like vessels 1a and 1b, a communicating tube 5 for communicating the interior of the vessels 1a and 1b at the lower end thereof. A gas-guiding tube 2 and 3 are provided at the upper part of the vessel 1a and 1b, respectively. The interior of the vessel 1a is filled with an organic metal compound 10 and a dispersing member 11 for dispersing the carrier gas introduced from the gas conductive tube 2, in this order, from the bottom of the vessel 1a. The other vessel 1b is filled with the organic metal compound 10. COPYRIGHT: (C)2009,JPO&INPIT