FLOW RATE MEASUREMENT DEVICE

PROBLEM TO BE SOLVED: To execute appropriate alarm processing only when a flow rate measurement value shows a real abnormality. SOLUTION: The device includes a measurement unit which measures the flow rate of fluid circulating in a channel, a setting part 311 which sets a lower limit for the measurement values of the measurement unit, a flow rate monitoring part 313 which executes the alarm processing when the measurement value of the measurement unit is lower than the lower limit, and an alarm control part 312 which conducts the ineffective control of the alarm processing until the measurement value of the measurement unit exceeds the lower limit from a time at which the fluid begins to circulate in the channel. COPYRIGHT: (C)2009,JPO&INPIT