ADVANCED FI BLADE FOR EXTRACTING SUBSTRATE AT HIGH TEMPERATURE

PROBLEM TO BE SOLVED: To provide an apparatus for transferring substrates in a processing system where the substrate is exposed to high temperatures; and a blade for transporting a substrate in one embodiment. SOLUTION: The blade comprises a base part having an arcuate lateral shoulder part, a first finger part extending outward from and perpendicularly to the base part, a second finger part extending outward from the base part and in parallel to and spaced-apart from the first finger, a first support tab configured to support the substrate and positioned along the arcuate lateral shoulder part, a second support tab configured to support the substrate and coupled with the first finger part, and a third support tab configured to support the substrate and coupled with the second finger, wherein the arcuate lateral shoulder extends from an outer edge of the first finger part to an outer edge of the second finger part. COPYRIGHT: (C)2009,JPO&INPIT