COMPOSITION FOR FILM FORMING AND SILICA-BASED FILM

PROBLEM TO BE SOLVED: To provide a composition for film forming which is hardly changed during storage and to provide a silica-based film made from the composition. SOLUTION: The film forming composition comprises a polycarbosilane having a main chain comprising a silicon atom and a carbon atom bein...

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Bibliographische Detailangaben
Hauptverfasser: NOBE YOHEI, ISHIZUKI KENJI, SUMIYA KOJI, NAKAGAWA YASUSHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a composition for film forming which is hardly changed during storage and to provide a silica-based film made from the composition. SOLUTION: The film forming composition comprises a polycarbosilane having a main chain comprising a silicon atom and a carbon atom being alternately and successively bonded and a structural unit represented by a general formula (1), and a structural unit formed by replacing H in the formula (1) with CH3, OH or OR (R represents a monovalent hydrocarbon group), and at least one organic solvent selected from the group consisting of the compounds represented by a general formula (5). R1O(CHCH3CH2O)aR2... (5). COPYRIGHT: (C)2009,JPO&INPIT