CERAMIC FILM AND METHOD OF MANUFACTURING THE SAME, SEMICONDUCTOR DEVICE, PIEZOELECTRIC DEVICE AND ACTUATOR

PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic film by which a surface morphology of the ceramic film can be improved, the ceramic film obtained by the method of manufacturing the ceramic film and a semiconductor device and a piezoelectric device to which the ceramic film of th...

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Bibliographische Detailangaben
Hauptverfasser:	NATORI EIJI, FURUYAMA KOICHI, TAZAKI YUZO
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY LIME, MAGNESIA METALLURGY PERFORMING OPERATIONS REFRACTORIES SEMICONDUCTOR DEVICES SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG, OR MIXTURESCONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER SLAG TRANSPORTING TREATMENT OF NATURAL STONE WORKING CEMENT, CLAY, OR STONE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic film by which a surface morphology of the ceramic film can be improved, the ceramic film obtained by the method of manufacturing the ceramic film and a semiconductor device and a piezoelectric device to which the ceramic film of the present invention is applied. SOLUTION: The method of manufacturing the ceramic film includes a step of forming the ceramic film 30 by crystallizing a raw material body 20. The raw material body 20 includes different types of raw materials in a mixed state. The different types of raw materials differ from one another in at least one of a crystal growth condition and a crystal growth mechanism in the crystallization of the raw materials. COPYRIGHT: (C)2009,JPO&INPIT