COATER/DEVELOPER, METHOD OF COATING AND DEVELOPING, AND STORING MEDIUM

PROBLEM TO BE SOLVED: To reduce operation cost by automatically finding the number of heating modules to be used and eliminating a waste of power consumption. SOLUTION: A transfer flow is produced in accordance with a process recipe. In the transfer flow, a type of modules listed in accordance with...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIYATA AKIRA, TATEYAMA MASANORI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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