COATER/DEVELOPER, METHOD OF COATING AND DEVELOPING, AND STORING MEDIUM

PROBLEM TO BE SOLVED: To reduce operation cost by automatically finding the number of heating modules to be used and eliminating a waste of power consumption. SOLUTION: A transfer flow is produced in accordance with a process recipe. In the transfer flow, a type of modules listed in accordance with a substrate transfer order is associated with a necessary staying time from when the substrate is transferred into a module by a substrate transfer unit to when the substrate is ready to be transferred back to the substrate transfer unit after the corresponding process is finished. A cycle limiting time of each module listed in the transfer flow is determined to be the longest necessary transfer cycle time among those obtained by dividing the necessary staying time by the number of the corresponding mounted modules. The number of the modules to be used as heating module listed in the transfer flow is determined to be a value obtained by dividing the necessary staying time by the cycle limiting time or a nearest integer to which the value is raised. COPYRIGHT: (C)2009,JPO&INPIT