METHOD FOR POSITIONING OBJECT BY ELECTROSTATIC MOTOR, STAGE DEVICE, AND LITHOGRAPHIC EQUIPMENT
PROBLEM TO BE SOLVED: To provide a solution using a less calculation amount than conventional methods, even with at least a partial possibility for compensating pitch torque of an electromagnetic motor. SOLUTION: The method for positioning an object is performed by the electromagnetic motor generati...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
container_end_page | |
---|---|
container_issue | |
container_start_page | |
container_title | |
container_volume | |
creator | MATTAAR THOMAS AUGUSTUS COX HENRIKUS HERMAN MARIE |
description | PROBLEM TO BE SOLVED: To provide a solution using a less calculation amount than conventional methods, even with at least a partial possibility for compensating pitch torque of an electromagnetic motor. SOLUTION: The method for positioning an object is performed by the electromagnetic motor generating a plurality of primary forces and pitch torques related to the primary forces in use. The method includes a step for determining a desirable force and torque to position the object, determining the primary force to be generated by the motor, determining the pitch torque by means of the primary force or a desirable force and torque, and determining a desirable signal to the motor for generating the primary force. The desirable force and torque to position the object is corrected in the subsequent cycle by using the pitch torque determined in the step of the anterior cycle before determining the primary force. COPYRIGHT: (C)2009,JPO&INPIT |
format | Patent |
fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2009089595A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2009089595A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2009089595A3</originalsourceid><addsrcrecordid>eNqNjMEKgkAURd20iOofHq0NpBByOY5PfaLzpvEVtEkkplWUYP9Ps-gDWt1z4HCX0a1DqbmAkh1Y7kmIDZkKOG9QC-RXwDaA416UkIaOhV0MwSqEAi-kMQZlCmgp_FRO2TpUeDqT7dDIOlo8xufsN79dRdsSRdc7P70HP0_j3b_8Z2jsPkmy5JilWaoOf0Vfg5EzcA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>METHOD FOR POSITIONING OBJECT BY ELECTROSTATIC MOTOR, STAGE DEVICE, AND LITHOGRAPHIC EQUIPMENT</title><source>esp@cenet</source><creator>MATTAAR THOMAS AUGUSTUS ; COX HENRIKUS HERMAN MARIE</creator><creatorcontrib>MATTAAR THOMAS AUGUSTUS ; COX HENRIKUS HERMAN MARIE</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a solution using a less calculation amount than conventional methods, even with at least a partial possibility for compensating pitch torque of an electromagnetic motor. SOLUTION: The method for positioning an object is performed by the electromagnetic motor generating a plurality of primary forces and pitch torques related to the primary forces in use. The method includes a step for determining a desirable force and torque to position the object, determining the primary force to be generated by the motor, determining the pitch torque by means of the primary force or a desirable force and torque, and determining a desirable signal to the motor for generating the primary force. The desirable force and torque to position the object is corrected in the subsequent cycle by using the pitch torque determined in the step of the anterior cycle before determining the primary force. COPYRIGHT: (C)2009,JPO&INPIT</description><language>eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CINEMATOGRAPHY ; CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS ; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS ; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ELECTROGRAPHY ; GENERATION ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; SEMICONDUCTOR DEVICES</subject><creationdate>2009</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20090423&DB=EPODOC&CC=JP&NR=2009089595A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25551,76302</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20090423&DB=EPODOC&CC=JP&NR=2009089595A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MATTAAR THOMAS AUGUSTUS</creatorcontrib><creatorcontrib>COX HENRIKUS HERMAN MARIE</creatorcontrib><title>METHOD FOR POSITIONING OBJECT BY ELECTROSTATIC MOTOR, STAGE DEVICE, AND LITHOGRAPHIC EQUIPMENT</title><description>PROBLEM TO BE SOLVED: To provide a solution using a less calculation amount than conventional methods, even with at least a partial possibility for compensating pitch torque of an electromagnetic motor. SOLUTION: The method for positioning an object is performed by the electromagnetic motor generating a plurality of primary forces and pitch torques related to the primary forces in use. The method includes a step for determining a desirable force and torque to position the object, determining the primary force to be generated by the motor, determining the pitch torque by means of the primary force or a desirable force and torque, and determining a desirable signal to the motor for generating the primary force. The desirable force and torque to position the object is corrected in the subsequent cycle by using the pitch torque determined in the step of the anterior cycle before determining the primary force. COPYRIGHT: (C)2009,JPO&INPIT</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CINEMATOGRAPHY</subject><subject>CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS</subject><subject>CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS</subject><subject>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>GENERATION</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2009</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjMEKgkAURd20iOofHq0NpBByOY5PfaLzpvEVtEkkplWUYP9Ps-gDWt1z4HCX0a1DqbmAkh1Y7kmIDZkKOG9QC-RXwDaA416UkIaOhV0MwSqEAi-kMQZlCmgp_FRO2TpUeDqT7dDIOlo8xufsN79dRdsSRdc7P70HP0_j3b_8Z2jsPkmy5JilWaoOf0Vfg5EzcA</recordid><startdate>20090423</startdate><enddate>20090423</enddate><creator>MATTAAR THOMAS AUGUSTUS</creator><creator>COX HENRIKUS HERMAN MARIE</creator><scope>EVB</scope></search><sort><creationdate>20090423</creationdate><title>METHOD FOR POSITIONING OBJECT BY ELECTROSTATIC MOTOR, STAGE DEVICE, AND LITHOGRAPHIC EQUIPMENT</title><author>MATTAAR THOMAS AUGUSTUS ; COX HENRIKUS HERMAN MARIE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2009089595A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2009</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CINEMATOGRAPHY</topic><topic>CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS</topic><topic>CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS</topic><topic>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>GENERATION</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>MATTAAR THOMAS AUGUSTUS</creatorcontrib><creatorcontrib>COX HENRIKUS HERMAN MARIE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MATTAAR THOMAS AUGUSTUS</au><au>COX HENRIKUS HERMAN MARIE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHOD FOR POSITIONING OBJECT BY ELECTROSTATIC MOTOR, STAGE DEVICE, AND LITHOGRAPHIC EQUIPMENT</title><date>2009-04-23</date><risdate>2009</risdate><abstract>PROBLEM TO BE SOLVED: To provide a solution using a less calculation amount than conventional methods, even with at least a partial possibility for compensating pitch torque of an electromagnetic motor. SOLUTION: The method for positioning an object is performed by the electromagnetic motor generating a plurality of primary forces and pitch torques related to the primary forces in use. The method includes a step for determining a desirable force and torque to position the object, determining the primary force to be generated by the motor, determining the pitch torque by means of the primary force or a desirable force and torque, and determining a desirable signal to the motor for generating the primary force. The desirable force and torque to position the object is corrected in the subsequent cycle by using the pitch torque determined in the step of the anterior cycle before determining the primary force. COPYRIGHT: (C)2009,JPO&INPIT</abstract><oa>free_for_read</oa></addata></record> |
fulltext | fulltext_linktorsrc |
identifier | |
ispartof | |
issn | |
language | eng |
recordid | cdi_epo_espacenet_JP2009089595A |
source | esp@cenet |
subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GENERATION HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES |
title | METHOD FOR POSITIONING OBJECT BY ELECTROSTATIC MOTOR, STAGE DEVICE, AND LITHOGRAPHIC EQUIPMENT |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-16T01%3A41%3A41IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=MATTAAR%20THOMAS%20AUGUSTUS&rft.date=2009-04-23&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2009089595A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |