METHOD FOR POSITIONING OBJECT BY ELECTROSTATIC MOTOR, STAGE DEVICE, AND LITHOGRAPHIC EQUIPMENT

PROBLEM TO BE SOLVED: To provide a solution using a less calculation amount than conventional methods, even with at least a partial possibility for compensating pitch torque of an electromagnetic motor. SOLUTION: The method for positioning an object is performed by the electromagnetic motor generating a plurality of primary forces and pitch torques related to the primary forces in use. The method includes a step for determining a desirable force and torque to position the object, determining the primary force to be generated by the motor, determining the pitch torque by means of the primary force or a desirable force and torque, and determining a desirable signal to the motor for generating the primary force. The desirable force and torque to position the object is corrected in the subsequent cycle by using the pitch torque determined in the step of the anterior cycle before determining the primary force. COPYRIGHT: (C)2009,JPO&INPIT