METHOD OF INSPECTING TRANSPARENT SUBSTRATES

PROBLEM TO BE SOLVED: To provide an inspection method of a transparent substrate, wherein the unevenness of the thickness of a manufactured transparent substrate is easily confirmed. SOLUTION: A first transparent substrate having a known distribution of thickness and a second transparent substrate t...

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Bibliographische Detailangaben
Hauptverfasser:	LAUENSTEIN CHRISTIAN, OZEKI MASAO, FERTIG WERNER
Format:	Patent
Sprache:	eng
Schlagworte:	ADVERTISING COLORIMETRY CRYPTOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DISPLAY DISPLAYING EDUCATION FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LABELS OR NAME-PLATES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS RADIATION PYROMETRY SEALS SIGNS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an inspection method of a transparent substrate, wherein the unevenness of the thickness of a manufactured transparent substrate is easily confirmed. SOLUTION: A first transparent substrate having a known distribution of thickness and a second transparent substrate to be inspected are prepared, and the difference of thickness in average between first and second transparent substrates is not more than 50 μm. A substrate gap of at least 0.1 mm is provided between the first substrate and the second substrate. Light whose half value width with respect to the peak luminance is at least 5 nm is radiated. The degree of distribution of thickness of the second transparent substrate is determined based on the interference intensity distribution of light passing through the first transparent substrate and the second transparent substrate. COPYRIGHT: (C)2009,JPO&INPIT