PIEZOELECTRIC SENSOR

PROBLEM TO BE SOLVED: To provide a high-sensitivity piezoelectric sensor with an effect of a floating capacitance being suppressed by preventing entrapment of air during lamination of base materials. SOLUTION: Piezoelectric bodies 1 generating an electrical potential upon application of pressure, each having a first surface a1 and a second surface a2 opposing to the first surface a1, a first base material 5 whose one surface g1 carries signal electrodes 4 facing to the first surfaces a1 of the first piezoelectric bodies 1, the surface g1 having the signal electrodes 4 being so disposed to be bonded to the first surfaces a1 of the piezoelectric bodies 1, a second base material 8 whose one surface d1 carries a first ground electrode 7 facing to the second surfaces a2 of the piezoelectric bodies 1, the surface d1 having the first ground electrode 7 being so disposed to be bonded to the second surfaces a2 of the piezoelectric bodies 1, and a spacer member 6 whose one surface b1 is bonded to the surface g1 having the signal electrodes 4 of the first base material 5, and whose other surface b2 is bonded to the surface d1 having the first ground electrode 7 of the second base material 8, the spacer member 6 being provided in an area other than the areas where the piezoelectric bodies 1 are disposed (e.g. h). COPYRIGHT: (C)2009,JPO&INPIT