PROBE DEVICE AND PROBE METHOD

PROBLEM TO BE SOLVED: To provide a means for preventing electrostatic breakdown of an IC chip based on a charged probe card, in a probe device which investigates the electrical characteristics of an IC chip on a wafer by using a probe card. SOLUTION: In the probe device, ionized air is supplied to a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KONO ISAO, HANAWA KAZUNORI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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