PROBE DEVICE AND PROBE METHOD

PROBLEM TO BE SOLVED: To provide a means for preventing electrostatic breakdown of an IC chip based on a charged probe card, in a probe device which investigates the electrical characteristics of an IC chip on a wafer by using a probe card. SOLUTION: In the probe device, ionized air is supplied to a probe card 3 from the upper side or lower side by an ionizer 5. For example, the ionizer is arranged outside of a test head 4, and a gas supply pipe is laid up to the proximity of the upper side of the probe card from here through an opening 4a in the center of the test head, and a nozzle part 61 is provided in the end thereof. A camera for imaging an electrode pad of the IC chip on the wafer is mounted, and the nozzle part is provided in a movement member which is moved horizontally between the probe card and a wafer W placement table, and the ionized air is discharged toward the probe card from here. COPYRIGHT: (C)2009,JPO&INPIT