METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device capable of forming a fin with a high precision and a sufficient yield. SOLUTION: This invention relates to the method of manufacturing the semiconductor device, including the steps of: making an active region 4 a conca...

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Bibliographische Detailangaben

1. Verfasser:	KUJIRAI YUTAKA
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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