PHOTOELECTRIC CONVERSION DEVICE AND MANUFACTURING METHOD OF PHOTOELECTRIC CONVERSION DEVICE

PROBLEM TO BE SOLVED: To provide a technology capable of maintaining the surface state of a neighboring area in a sound state and preventing water from permeating through a substrate end. SOLUTION: This manufacturing method includes: a photoelectric conversion unit forming process for forming a photoelectric conversion unit divided into a plurality of photoelectric conversion cells on the main surface of a substrate; and a neighboring region forming step of forming a neighboring region by removing the photoelectric conversion unit formed at the peripheral edge of the main surface. The photoelectric conversion unit forming process includes a step of forming a transparent electrode layer on the main surface of the substrate. The transparent electrode layer forming step includes a step for depositing a transparent electrode layer on the main surface, and a transparent electrode layer etching step for performing laser etching so that the deposited transparent electrode layer can be divided. In the transparent electrode layer etching step, a laser beam is emitted so that the length of a line irradiated with the laser beam in the neighboring region before removing the photoelectric conversion unit may exceed the end of a power generation region as a region where power is extracted at the time of power generation, and may be ≤10 mm. COPYRIGHT: (C)2009,JPO&INPIT