METHOD AND APPARATUS FOR MEASURING BEAM CURRENT OF ELECTRON-BEAM PLOTTING APPARATUS

PROBLEM TO BE SOLVED: To provide a method for measuring a beam current of an electron-beam plotting apparatus capable of measuring the current density of an electron beam while carrying out the on-line operation. SOLUTION: In the method for measuring a beam current of an electron-beam plotting apparatus, wherein an electron beam of an arbitrary shape is formed by combining a first slid and a second slit, and a plotted material 12 is irradiated with the electron beam to plot a predetermined pattern thereon, the current Ia flowing through the second slit is obtained by making the second slit so that the electron beam does not pass through the opening thereof, then the current Ib flowing through the second slit is obtained by making the part of the second slit so that part of the electron beam passes through the opening thereof, and the current density on the surface of the material is measured based on the difference between the currents Ia and Ib. COPYRIGHT: (C)2009,JPO&INPIT