SAMPLE SUPPORT STAGE FOR OBSERVING THREE-DIMENSIONAL STRUCTURE, PROTRACTOR AND THREE-DIMENSIONAL STRUCTURE OBSERVING METHOD
PROBLEM TO BE SOLVED: To provide a sample support stage for observing a three-dimensional structure of high versatility with a sample constitution while adopting a constitution capable of always holding a sample in the visual field center of an electron microscope, a protractor and a three-dimension...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a sample support stage for observing a three-dimensional structure of high versatility with a sample constitution while adopting a constitution capable of always holding a sample in the visual field center of an electron microscope, a protractor and a three-dimensional structure observing method. SOLUTION: This sample support stage 30 has a base 31 and a sample support member 32 rotatably arranged to the base 31, and is arranged via a holder 10 in a tip part of a rotary member 16 rotatable in a ± specific angle range from a reference attitude. The protractor 40 marked with a plurality of angle graduations at a specific angle interval is installed on the sample support stage 30. While adjusting an index 34 of the sample support member 32 to the graduations 42 of the protractor 40, a plurality of turning angle states rotated stepwise at a specific angle interval to the base 31 are maintained, and the sample can be observed from all the directions of 360° by successively rotating a rotary member at the ± specific angle in the respective turning angle states. COPYRIGHT: (C)2009,JPO&INPIT |
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