MASTER DISK FOR OPTICAL DISK
PROBLEM TO BE SOLVED: To provide a maser disk for optical disk which is hardly broken, is easily handled and has a high definition pattern. SOLUTION: The master disk for optical disk has a substrate 10 having a polished surface, a first underlayer 11 formed on the polished surface of the substrate 1...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a maser disk for optical disk which is hardly broken, is easily handled and has a high definition pattern. SOLUTION: The master disk for optical disk has a substrate 10 having a polished surface, a first underlayer 11 formed on the polished surface of the substrate 10, a second underlayer 12 formed on the substrate 10 so as to cover the first underlayer 11 and an inorganic resist layer 13 formed on the second underlayer 12. The first underlayer 11 has thermal conductivity higher than that of the substrate 10 and the second underlayer 12 is hardly dissolved in an alkali solution more than the first underlayer 11. COPYRIGHT: (C)2009,JPO&INPIT |
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