APPARATUS FOR MANUFACTURING MASTER DISK

PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a master disk which causes no deviation between a start point and an end point of each concentric track created by an electron beam irradiation trace and causes no variation in intervals between the concentric tracks even when ideal movement of a stage cannot be performed by variation in speed of stage movement, vibration and the like generated inside and outside the apparatus for manufacturing the master disk. SOLUTION: The apparatus 10 for manufacturing the master disk is provided with: a linear encoder 18 for detecting a position of a moving stage 16; a rotary encoder 18 for detecting a rotational angle of a turntable 14; an original point detecting means for detecting one rotation of the turntable 14; a stage movement amount calculating means 21 for calculating a stage movement amount for each prescribed rotational angle in one rotation of the turntable 14; and an electron beam irradiation position adjusting means 22 for adjusting an irradiation position, to the master disk 12 by reflecting the stage movement amount obtained by the stage movement amount calculating means 21 for each prescribed rotational angle to deflection of an electron beam EB in an electron beam deflection electrode 35. COPYRIGHT: (C)2009,JPO&INPIT