APPARATUS FOR INSPECTING VIBRATION-TYPE PHYSICAL QUANTITY SENSOR, AND THE SAME SENSOR

PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a vibration-type physical quantity sensor capable of performing inspection efficiently and accurately, and to provide the vibration-type physical quantity sensor. SOLUTION: The apparatus for inspecting the vibration-type gyro sensor outputs a detection signal based on external force operating on a vibration section while vibrating the vibration section. The apparatus supplies power to a plurality of gyro sensors (sensors A-D) mounted on an inspection board 20, rotates and drives the inspection board 20 where the plurality of gyro sensors (sensors A-D) are mounted for giving external force to a vibrator 1 in the plurality of gyro sensors, is mounted on the inspection board 20 during operation, vibrates the vibrators 1 sequentially one by one for outputting a detection signal to the plurality of gyro sensors (sensors A-D) while power is being supplied, and performs inspection based on the detection signal. COPYRIGHT: (C)2009,JPO&INPIT