ROTATION MECHANISM AND ELECTRON BEAM LITHOGRAPHY DEVICE

PROBLEM TO BE SOLVED: To precisely align a substrate on the center of rotation of a rotation table. SOLUTION: A substrate tray 40 is placed on the rotation table 32 while fixation lock pins 50A and 50C and a movement lock pin 50B provided on the rotation table 32 are inserted into circular openings...

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Bibliographische Detailangaben
1. Verfasser:	MURAYAMA NOBORU
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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