AUTOMATIC FOCUSING DEVICE, AUTOMATIC FOCUSING METHOD, AND MEASURING DEVICE

PROBLEM TO BE SOLVED: To image a target to be measured, by adjusting a focus regardless of reflectivity of the target to be measured. SOLUTION: Light sources 11a to 11c of an illuminating light source 11 can be selectively switched between when a pattern projected on a substrate 2 to be measured is...

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1. Verfasser:	ASHIHARA KATSUMITSU
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CINEMATOGRAPHY ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY ELECTROGRAPHY GYROSCOPIC INSTRUMENTS HOLOGRAPHY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NAVIGATION OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHOTOGRAPHY PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION SURVEYING TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To image a target to be measured, by adjusting a focus regardless of reflectivity of the target to be measured. SOLUTION: Light sources 11a to 11c of an illuminating light source 11 can be selectively switched between when a pattern projected on a substrate 2 to be measured is split by a beam splitter 16, to be detected by a line sensor 19 in an autofocus mode, and when the substrate 2 is photographed by a two-dimensional CCD in an imaging mode. The device is configured so that the contrast of the projection pattern is sufficiently obtained in the autofocus mode and the sharp image of the substrate 2 is obtained in the imaging mode. COPYRIGHT: (C)2009,JPO&INPIT