THIN FILM REMOVAL DEVICE

PROBLEM TO BE SOLVED: To provide a thin film removal device which can selectively remove a prescribed part of a thin film applied onto a substrate from the substrate and can construct the thin film patterned on the substrate. SOLUTION: The thin film removal device is provided with a substrate fixing board 25 for placing and fixing the substrate to which the thin film is applied, a cleaning sheet conveying/supplying mechanism for conveying and supplying a cleaning sheet 4 to a thin film removed part of the thin film on the substrate, which is placed on the substrate fixing board, a cleaning solution supply mechanism 5 for impregnating cleaning solution to the cleaning sheet, a pressing mechanism for pressing the cleaning sheet impregnating cleaning solution, which is conveyed and supplied to the thin film removed part of the thin film on the substrate, onto the thin film on the substrate, and a driving mechanism for relatively moving the pressing mechanism and the substrate fixing board and selectively removing a part of the thin film pressed to the pressing part. COPYRIGHT: (C)2009,JPO&INPIT