SAMPLE HOLDER FOR CHARGED PARTICLE BEAM DEVICE AND RESERVE EXHAUST CHAMBER FOR CHARGED PARTICLE BEAM DEVICE

SAMPLE HOLDER FOR CHARGED PARTICLE BEAM DEVICE AND RESERVE EXHAUST CHAMBER FOR CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To provide a sample holder for a charged particle beam device and a reserve exhaust chamber for a charged particle beam device capable of properly and surely conveying a sample and a sample holder into a sample chamber, regarding the sample holder for a charged particle beam de...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MIYAO HIROFUMI, TAKAYAMA SHIGEYUKI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a sample holder for a charged particle beam device and a reserve exhaust chamber for a charged particle beam device capable of properly and surely conveying a sample and a sample holder into a sample chamber, regarding the sample holder for a charged particle beam device and the reserve exhaust chamber for a charged particle beam device. SOLUTION: The sample holder for a charged particle beam device is formed to be asymmetric in the front-and-rear, right-and-left, and surface-and-rear-face directions by deforming its one corner. Thus, the sample holder for a charged particle beam device and the reserve exhaust chamber for a charged particle beam device capable of properly and surely conveying the sample and the sample holder to the sample chamber are provided. COPYRIGHT: (C)2009,JPO&INPIT