MOLD FOR NANOIMPRINT AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a mold matrix material which is excellent in oil repellency and is used for a nanoimprint, and to provide its manufacturing method. SOLUTION: The mold matrix material and the mold used for the nanoimprint have a mold surface composed of fluorinated composite quartz g...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OKADA KANAME, TAMITSUJI SHINYA, WATANABE KUNIO
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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