LIQUID JETTING HEAD AND LIQUID JETTING DEVICE
PROBLEM TO BE SOLVED: To provide a liquid jetting head and a liquid jetting device for which cost is reduced and reliability is improved by improving the joint strength of a piezoelectric element and a wiring substrate. SOLUTION: Inner electrodes 16 and 17 respectively constitute two poles and are a...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a liquid jetting head and a liquid jetting device for which cost is reduced and reliability is improved by improving the joint strength of a piezoelectric element and a wiring substrate. SOLUTION: Inner electrodes 16 and 17 respectively constitute two poles and are alternatively stacked so as to sandwich a piezoelectric material layer 15. Outer electrodes 20 are respectively connected to the inner electrodes 16 and 17 of respective poles. A piezoelectric element formation member 13 has the inner electrodes 16 and 17, the outer electrodes 20 on its outer surface, and a row of piezoelectric elements divided like a comb by a plurality of slits. A piezoelectric element unit has a fixing substrate 14 which is joined with one-end side of the piezoelectric element formation member 13 and retains it so that the other end side of the piezoelectric elements is free ends. A film-like wiring substrate is provided with a drive IC for driving the piezoelectric elements and connection wiring 33 electrically connected to the plurality of piezoelectric elements. The outer electrodes 20 of a piezoelectric element unit 10 and the connection wiring 33 of the wiring substrate are electrically connected to each other via a connection layer 35 comprising an anisotropic conductive material. COPYRIGHT: (C)2009,JPO&INPIT |
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