LASER ANNEALING DEVICE, AND LASER ANNEALING METHOD

PROBLEM TO BE SOLVED: To provide a laser annealing device equipped with a measuring instrument capable of accurately measuring the shape and intensity of a laser beam, and to provide a laser annealing method. SOLUTION: The laser annealing device has a laser oscillator 31, a birefringent crystal 34 disposed in the optical path of the laser beam and splitting the beam to remove harmonic components thereof, a beam shaping means 4 of shaping the beam into a predetermined shape, and a treatment chamber having an X-Y stage 52 supporting an object to be annealed at an irradiation position of the shaped beam, and is characterized in that the laser beam measuring instrument is equipped with two or more detecting means 1 of detecting the intensity and shape of the shaped beam is provided at a peripheral edge of the stage 52 while each of the detecting means has an attenuating means 14 of attenuating the energy of the beam. COPYRIGHT: (C)2009,JPO&INPIT