EVAPORATION SOURCE, METHOD OF MANUFACTURING EVAPORATION SOURCE, AND METHOD OF MANUFACTURING ORGANIC EL DISPLAY DEVICE

PROBLEM TO BE SOLVED: To solve problems that as a patterning method for painting out a light-emitting layer of an organic EL element at every light-emitting color of RGB, a vacuum deposition method using a deposition mask is not suitable for large sizing of a display device, and a laser heat transfe...

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1. Verfasser: HIGO TOMOYUKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To solve problems that as a patterning method for painting out a light-emitting layer of an organic EL element at every light-emitting color of RGB, a vacuum deposition method using a deposition mask is not suitable for large sizing of a display device, and a laser heat transfer method has cost increase of a manufacturing device. SOLUTION: By using an evaporation source 11 equipped with a first electrode pattern 13 formed on a glass substrate 12 in a stripe shape, a second electrode pattern 14 formed on the glass substrate 12 in the stripe shape so as to cross the first electrode pattern 13, and a resistance heating layer 15 installed at a crossing part of the first electrode pattern 13 and the second electrode pattern 14, the glass substrate 12 in which an evaporation material layer 25 composed of an organic material is formed and a substrate 3 for element formation are superposed, and by applying a prescribed voltage to the first electrode pattern 13 and the second electrode pattern 14, the organic material is sublimated by Joule heat generated in the resistance heating layer 15 installed at their crossing part, the organic membrane is formed on the substrate 3 for element formation. COPYRIGHT: (C)2009,JPO&INPIT