APPEARANCE INSPECTION METHOD OF COLOR FILTER
PROBLEM TO BE SOLVED: To provide an appearance inspection method of a color filter for inspecting defects by specifying in what color's colored pixel a defect in the color filter has occurred at an inspection stage and applying a different standard for each color. SOLUTION: The density range of...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an appearance inspection method of a color filter for inspecting defects by specifying in what color's colored pixel a defect in the color filter has occurred at an inspection stage and applying a different standard for each color. SOLUTION: The density range of a conforming inspection pixel, such as a colored pixel, is set in advance. When imaging a body to be inspected, the number of detection inspection pixels for determining the colored pixel, or the like of each color is set. Then, a contour section R3 is provided around a defect D3 according to the position information of the defect D3, each density of the contour inspection pixels is obtained and is totaled for each density range in comparison with the density range. Then, when the number of contour inspection pixels is not less than that of detection inspection pixels, it is determined that the defect is a colored pixel concerned, and the size of the defect is compared with that of the permissible defect of the color concerned for determining the propriety. COPYRIGHT: (C)2009,JPO&INPIT |
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