EQUIPMENT FOR MANUFACTURING POLYCRYSTAL SILICON

EQUIPMENT FOR MANUFACTURING POLYCRYSTAL SILICON

PROBLEM TO BE SOLVED: To provide equipment for manufacturing polycrystal silicon, wherein an quake-absorbing structure is applied at a low cost so that a function is surely kept even in the case of earthquakes in low to medium scales which frequently occur. SOLUTION: The equipment for manufacturing...

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Bibliographische Detailangaben
Hauptverfasser: KAMEI ISAO, NAKAMURA TAKESHI, KUBOTA JUNICHI, YOKOYAMA NORIYUKI, HASHIMOTO NORIYUKI
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide equipment for manufacturing polycrystal silicon, wherein an quake-absorbing structure is applied at a low cost so that a function is surely kept even in the case of earthquakes in low to medium scales which frequently occur. SOLUTION: The equipment for manufacturing polycrystal silicon, wherein reaction chambers 2 for precipitating and growing silicon by a chemical vapor phase precipitation method on a silicon core material 3 standing on an electrode so as to obtain polycrystal silicon rods 3, are arranged in a factory building, is characterized in that a quake-absorbing structure is applied to the polycrystal silicon rods in the reaction chambers 2. COPYRIGHT: (C)2009,JPO&INPIT