TOMOGRAM SYSTEM

PROBLEM TO BE SOLVED: To provide a tomogram system capable of surely measuring a rotation shake and of correcting a rotation shake generated by the run out measured, when a tomogram image is photographed. SOLUTION: The tomogram system comprises a rotation unit 15 for rotating at least one of an object to be inspected, a radiation source, and a radiation detector; an optical axis for connecting the radiation source and radiation detector; a variable unit 16 for varying a lamino-angle formed with a rotation axis; a calculation unit 19 for determining the amount of run out from transmission data which is detected by a radiation detector for each predetermined rotational-angle, when the object is controlled by the rotation unit over one revolution, in a state where the lamino-angle is set at 0° and the object used for measuring the amount of the run out is mounted on a table; and a correction unit 20 for correcting the amount of the run out, by giving the table or the optical axis a movement for canceling the amount of the amount of the run out, in response to the rotation angle of this rotation, when the object is rotation-controlled by the rotation unit in the detection of the transmission data of the object by the radiation detector, when the lamino-angle is set at a value other than 0°. COPYRIGHT: (C)2009,JPO&INPIT