REACTION FORCE PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide a reaction force processing apparatus whose upsizing can be suppressed. SOLUTION: The reaction force processing apparatus 1 is provided on a moving stage apparatus 10 on which a stage 12 moves on a platen 11 installed on a floor 25 via vibration removing springs 16, and processes reaction forces F1, F2to be generated on the platen 11 caused by the movement of the stage 12. The reaction force processing apparatus 1 is provided with a reaction force processing actuator 2 for applying a counter thrust force R to the platen 11, and a rotating plate 7 provided on a first platen portion 20 of the platen 11 and rotating around a rotary shaft 8 provided along a horizontal direction. The reaction forces F1, F2are reduced and canceled by the counter thrust force R generated in the reaction processing actuator 2, and a moment generated on the platen 11 is reduced and canceled by a canceling moment T generated by the rotation of the rotary plate 7. Accordingly, the reaction forces F1, F2and the moment generated on the platen 11 by the effects of the forces are independently canceled. COPYRIGHT: (C)2009,JPO&INPIT