REACTION FORCE PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide a reaction force processing apparatus whose upsizing can be suppressed. SOLUTION: The reaction force processing apparatus 1 is provided on a stage apparatus 10 provided with a platen 11 having a plurality of platen surfaces 18, 19 different in height from each other and installed on a floor 25 via a vibration removing springs 16, 16, and stages 121, 122disposed on plate surfaces 18, 19 and moving over the platen surfaces, and processes reaction forces F1, F2to be generated on the platen 11 caused by the movement of the stages 121, 122. The reaction force processing apparatus 1 is also provided with first and second reaction force processing actuators 21, 22for applying counter thrust forces R1, R2to the platen 11, and a control section 31 for controlling the magnitude of the counter thrust forces R1, R2. In the reaction force processing apparatus 1, a working point is different in height between the counter thrust forces R1and R2in the platen 11, and the control section 31 controls the counter thrust forces R1, R2so that the reaction forces F1, F2can be canceled as a resultant force or a resultant moment. COPYRIGHT: (C)2009,JPO&INPIT