SUBSTRATE DETECTION DEVICE, AND SUBSTRATE PROCESSING DEVICE

PROBLEM TO BE SOLVED: To provide a substrate detection device which can accurately detect the holding state of a substrate under processing, and to provide a substrate processing device provided with the same. SOLUTION: The substrate detection device is provided with: an imaged image generation means to image the held substrate and generate a data of an imaged image thereof; a holding position specification means wherein, when the pixel value of pixels constituting a substrate image is computed in the circumferential direction of the substrate, peak positions indicated in peak profile data generated along the arrangement direction of the substrate is specified, and the deviation of the peak position due to a difference in the number of substrates held by a holding means is corrected, and the holding position of the substrate is specified according to the corrected peak position; and a holding condition decision means to compare the specified holding position of the substrate with a supposed holding position, generate a detection result indicating that the holding condition of the substrate is normal when both positions are matched, and to generate a detection result indicating that the holding condition is normal or not according that both positions are matched or not. COPYRIGHT: (C)2009,JPO&INPIT